Title :
Epitaxial growth of PbTiO/sub 3/ films on SrTiO/sub 3/ by RF magnetron sputtering
Author :
Kushida, Keiko ; Takeuchi, Hiroshi
Author_Institution :
Hitachi Ltd., Tokyo, Japan
Abstract :
Epitaxial growth of PbTiO/sub 3/ films on
Keywords :
epitaxial layers; ferroelectric thin films; lead compounds; piezoelectric devices; piezoelectric materials; piezoelectric thin films; sputter deposition; sputtered coatings; transmission electron microscope examination of materials; vapour phase epitaxial growth; PbTiO/sub 3/ films; Pt electrode film; RF magnetron sputtering; SrTiO/sub 3/; TEM micrograph; electromechanical coupling constant; epitaxial growth; ferroelectric properties; film quality; film thickness; high-temperature sputtering; impedance characteristics; lateral overgrowth; perovskite structure; piezoelectric device applications; thicker film; wide annealing temperature range; Annealing; Electrodes; Epitaxial growth; Ferroelectric films; Ferroelectric materials; Piezoelectric devices; Piezoelectric films; Radio frequency; Sputtering; Temperature distribution;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
