Title :
Static buckling and actuation of free-standing mesoscale beams
Author :
Carr, Stephen M. ; Lawrence, Walter E. ; Wybourne, Martin N.
Author_Institution :
Dept. of Phys. & Astron., Dartmouth Coll., Hanover, NH, USA
Abstract :
We discuss the static buckling and actuation of free-standing mesoscopic beams. As the length-to-width aspect ratio of the beams is increased, the buckled shapes become more complex. Mechanical actuation confirms that the complex shapes are stable equilibria and that metastable equilibria also exist. This is consistent with a nonlinear elastic continuum model, which incorporates asymmetry in higher order buckling modes. Preliminary results indicate that, in addition to purely mechanical actuation, electromechanical mode-mode transitions can be induced by utilizing fabricated electrodes.
Keywords :
actuators; beams (structures); buckling; continuum mechanics; elasticity; electromechanical effects; nanotechnology; stress effects; buckled shapes; buckling modes; electromechanical mode-mode transitions; fabricated electrodes; free-standing mesoscale beams; mechanical actuation; metastable equilibria; microelectromechanical devices; nanoelectromechanical systems; nonlinear elastic continuum model; static buckling; strain; Astronomy; Capacitive sensors; Equations; Etching; Fabrication; Nanoelectromechanical systems; Nanoscale devices; Physics; Shape; Silicon; Buckling; electromechanical effects; mesoscopic physics; microelectromechanical devices; nanoelectromechanical systems (NEMS); strain;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2005.858605