• DocumentCode
    1208941
  • Title

    Progress in ferroelectric memory technology

  • Author

    Geideman, William A.

  • Author_Institution
    McDonnell Douglas Electron. Syst. Co., Santa Ana, CA, USA
  • Volume
    38
  • Issue
    6
  • fYear
    1991
  • Firstpage
    704
  • Lastpage
    711
  • Abstract
    The application of ferroelectric films to semiconductor memories is discussed. Design and testing considerations are examined. A nonvolatile memory using the polarization hysteresis of ferroelectrics is described. Test results for PZT films on GaAs substrate are presented. The data show that nonvolatile memories are feasible and that commercial applications are within reach in the near future.<>
  • Keywords
    dielectric hysteresis; ferroelectric storage; ferroelectric thin films; lead compounds; GaAs substrate; PZT films; PbZrO3TiO3; ferroelectric films; ferroelectric memory technology; ferroelectric polarization hysteresis; nonvolatile memory; semiconductor memories; testing considerations; Ferroelectric films; Ferroelectric materials; Gallium arsenide; Hysteresis; Nonvolatile memory; Polarization; Semiconductor films; Semiconductor memory; Substrates; Testing;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.108872
  • Filename
    108872