Title :
Development of QTAT online electronic circuit patterning system
Author :
Wakasugi, Katsuhiko ; Wakimoto, Satoshi ; Akamichi, Takayuki ; Nakada, Akira ; Kubota, Hiroshi ; Inokuchi, Tsuneo ; Suzuki, Shinji ; Aikawa, Sou ; Kosaka, Kouji ; Nakamura, Kazumitsu ; Morimoto, Tatsuo
Author_Institution :
Graduate Sch. of Sci. & Technol., Kumamoto Univ., Japan
Abstract :
An arbitrary pattern exposure system has been developed by employing a liquid crystal display (LCD) with 1600 × 1200 pixels for the formation of projection images in place of a conventional reticle. The minimum pattern size becomes 11.5 μm, which corresponds to the aperture size of each pixel on the LCD. For the purpose of quick turnaround time (TAT), the exposure system was directly connected to the circuit design system with the transmission control protocol/internet protocol network. From the experimental results on patterning of a typical electronic circuit data with the area of 46× 46 mm, it was confirmed that the TAT from the output of design data to the finish of the exposure becomes less than 28 min. By using this system, reduction of the production cost in the printed wiring boards fabrication is expected.
Keywords :
circuit CAD; liquid crystal displays; photolithography; printed circuit design; printed circuit manufacture; process control; 11.5 micron; Internet protocols; QTAT online electronic circuit patterning system; circuit CAD; circuit design system; liquid crystal displays; photolithography; printed circuit design; printed circuit manufacture; printed wiring boards; production cost reduction; transmission control protocols; transport protocols; Apertures; Circuit synthesis; Control systems; Costs; Electronic circuits; IP networks; Liquid crystal displays; Pixel; Production systems; Protocols; Liquid crystal display (LCD); lithography; printed circuits;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2005.858547
