Title :
The impact of III-V semiconductors on microelectromechanical systems
Author :
Woods, R.C. ; Powell, A.L.
Author_Institution :
Dept. of Electron. & Electr. Eng., Sheffield Univ., UK
fDate :
12/1/1994 12:00:00 AM
Abstract :
This article examines the special features of the III-V semiconductors, such as gallium arsenide and chemically related compounds, which make them an attractive alternative to silicon-based technology in the field of microelectromechanical systems. As in conventional electronic systems, it is not expected that the III-V compounds will become exclusively used in all instances, but rather a substantial niche market-exploiting the special advantages of the compound semiconductors-is likely to be established
Keywords :
III-V semiconductors; micromechanical devices; III-V semiconductors; compound semiconductors; material properties; microelectromechanical systems; niche market;
Journal_Title :
Engineering Science and Education Journal
DOI :
10.1049/esej:19940607
