Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. II. Evaluation, analysis, and theoretical modeling of the gas chromatography system

Author

Kolesar, Edward S., Jr. ; Reston, Rocky R.

Author_Institution

Dept. of Eng., Texas Christian Univ., Fort Worth, TX, USA

Volume

3

Issue

4

fYear

1994

fDate

12/1/1994 12:00:00 AM

Firstpage

147

Lastpage

154

Abstract

A miniature gas chromatography (GC) system was designed and developed using silicon micromachining and integrated circuit (IC) processing techniques. The MMGC system can separate parts-per-million (ppm) ammonia and nitrogen dioxide concentrations in less than 30 minutes when isothermally operated (80°C) at 40 psi. The heat of adsorption of nitrogen dioxide (0.38 eV) on a CuPc thin film (0.2 μm thick) was also independently established. As a result of the MMGC system´s performance evaluation, several of the assumptions invoked in the initial design were re-investigated, and a refined technique for optimizing the MMGC system´s operation and performance was developed

Keywords

ammonia; chromatography; gas sensors; micromachining; microsensors; nitrogen compounds; 40 psi; 80 degC; CuPc thin film; MMGC system; NH₃; NO₂; gas chromatography system; heat of adsorption; integrated circuit processing techniques; isothermal operation; silicon-micromachined system; Detectors; Gas chromatography; Gases; Instruments; Integrated circuit modeling; Nitrogen; Performance analysis; Silicon; System analysis and design; Temperature;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.338635

Filename

338635