Title :
Parameters extraction and modeling for planar spiral inductor on Si-SiO2 substrates by DDM for conformal modules
Author :
Zhao, Ji-Xiang ; Mao, Jun-Fa
Author_Institution :
Dept. of Electron. Eng., Shanghai Jiao Tong Univ., China
fDate :
6/1/2003 12:00:00 AM
Abstract :
In this paper, the domain decomposition method (DDM) for conformal modules is used to get simple analytic expressions for parameters of planar spiral inductors on Si-SiO2 substrates. The conductor and substrate losses are considered in the expressions. The quality factor of the spiral inductor is computed with a transmission-line mode and compared with previously published experimental results, showing that DDM model is accurate and efficient for modeling an on-chip spiral inductor on Si-SiO2 substrates.
Keywords :
Q-factor; conformal mapping; inductors; microstrip lines; modules; parameter estimation; radiofrequency integrated circuits; silicon; silicon compounds; transmission line theory; DDM; RF circuits; Si; Si-SiO2; Si-SiO2 substrates; conductor losses; conformal modules; domain decomposition method; lossy Si substrate; microstrip structure; modeling; parameters extraction; planar spiral inductor; quality factor; substrate losses; transmission-line mode; Conductors; Dielectric substrates; Distributed decision making; Impedance; Inductors; Parameter extraction; Q factor; Spirals; Strips; Transmission lines;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2003.812581
