Title :
Measurement of dielectric anisotropy of BPDA-PDA polyimide in multilayer thin-film packages
Author :
Deutsch, Alina ; Swaminathan, Madhavan ; Ree, M.-H. ; Surovic, Christopher W. ; Arjavalingam, G. ; Prasad, Keshav ; McHerron, Dale C. ; Mcallister, Michael ; Kopcsay, Gerard V. ; Giri, A.P. ; Perfecto, Eric ; White, G.E.
Author_Institution :
IBM Microelectron., Hopewell Junction, NY, USA
fDate :
11/1/1994 12:00:00 AM
Abstract :
The measured dielectric anisotropy of BPDA-PDA polyimide, obtained from a specially designed test vehicle, is presented. The multilayer thin-film structure is representative of its actual use in multichip carrier (MCM-D) applications both from the cross sectional dimensions and fabrication sequence point of view. Modeling is performed using finite-element and electromagnetic techniques and the effect of anisotropy on signal propagation and crosstalk are verified through time-domain measurements
Keywords :
crosstalk; finite element analysis; multichip modules; permittivity; polymer films; time-domain analysis; BPDA-PDA polyimide; MCM-D; cross sectional dimensions; crosstalk; dielectric anisotropy; electromagnetic techniques; fabrication sequence; finite-element techniques; multichip carrier; multilayer thin-film packages; signal propagation; test vehicle; time-domain measurements; Anisotropic magnetoresistance; Dielectric measurements; Dielectric thin films; Electromagnetic measurements; Electromagnetic modeling; Fabrication; Nonhomogeneous media; Polyimides; Testing; Vehicles;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
