Title :
Special Section on the International Conference on Microelectronic Test Structures
fDate :
5/1/2008 12:00:00 AM
Abstract :
The ten papers in this special section were selected from papers presented at the 2006 International Conference on Microelectronic Test Structures, held in Austin, TX.
Keywords :
Centralized control; Circuit testing; Design for manufacture; Electronics industry; Helium; Microelectronics; Semiconductor device manufacture; Semiconductor device testing; Silicon; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2008.2000313