DocumentCode
1211636
Title
Metal diffusion in polymers
Author
Das, J.H. ; Morris, J.E.
Volume
17
Issue
4
fYear
1994
fDate
11/1/1994 12:00:00 AM
Firstpage
620
Lastpage
625
Abstract
The diffusive properties of copper, nickel, titanium and chromium have been studied in three polyimides and a fluoropolymer using both sputter-deposited surface film and shallow ion-implant sources. No measurable diffusion was found for either chromium or titanium, but diffusion constants and their thermal activation energies are presented for copper and nickel in each polymer. All the copper and nickel systems exhibit the clustering effects previously reported, and both atomic and cluster diffusion data are cited where possible. The metallic diffusion profiles from the surface films typically display three components: an initial subsurface distribution (which is actually due to the penetration of the surface by low energy ions during sputter-deposition), a shallow cluster distribution which contains the bulk of the diffusing material, and a deeper dilute atomic distribution
Keywords
chemical interdiffusion; chromium; copper; nickel; polymers; segregation; self-diffusion; surface diffusion; titanium; Cr; Cu; Ni; Ti; atomic diffusion data; cluster diffusion data; clustering effects; diffusion constants; diffusive properties; dilute atomic distribution; fluoropolymer; initial subsurface distribution; low energy ions; metallic diffusion profiles; polyimides; polymers; shallow cluster distribution; shallow ion-implant source; sputter-deposited surface film source; thermal activation energies; Atomic measurements; Chromium; Copper; Displays; Energy measurement; Inorganic materials; Nickel; Polyimides; Polymers; Titanium;
fLanguage
English
Journal_Title
Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
Publisher
ieee
ISSN
1070-9894
Type
jour
DOI
10.1109/96.338732
Filename
338732
Link To Document