• DocumentCode
    1211636
  • Title

    Metal diffusion in polymers

  • Author

    Das, J.H. ; Morris, J.E.

  • Volume
    17
  • Issue
    4
  • fYear
    1994
  • fDate
    11/1/1994 12:00:00 AM
  • Firstpage
    620
  • Lastpage
    625
  • Abstract
    The diffusive properties of copper, nickel, titanium and chromium have been studied in three polyimides and a fluoropolymer using both sputter-deposited surface film and shallow ion-implant sources. No measurable diffusion was found for either chromium or titanium, but diffusion constants and their thermal activation energies are presented for copper and nickel in each polymer. All the copper and nickel systems exhibit the clustering effects previously reported, and both atomic and cluster diffusion data are cited where possible. The metallic diffusion profiles from the surface films typically display three components: an initial subsurface distribution (which is actually due to the penetration of the surface by low energy ions during sputter-deposition), a shallow cluster distribution which contains the bulk of the diffusing material, and a deeper dilute atomic distribution
  • Keywords
    chemical interdiffusion; chromium; copper; nickel; polymers; segregation; self-diffusion; surface diffusion; titanium; Cr; Cu; Ni; Ti; atomic diffusion data; cluster diffusion data; clustering effects; diffusion constants; diffusive properties; dilute atomic distribution; fluoropolymer; initial subsurface distribution; low energy ions; metallic diffusion profiles; polyimides; polymers; shallow cluster distribution; shallow ion-implant source; sputter-deposited surface film source; thermal activation energies; Atomic measurements; Chromium; Copper; Displays; Energy measurement; Inorganic materials; Nickel; Polyimides; Polymers; Titanium;
  • fLanguage
    English
  • Journal_Title
    Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1070-9894
  • Type

    jour

  • DOI
    10.1109/96.338732
  • Filename
    338732