Title :
MMIC internal electric field mapping with submicrometre spatial resolution and gigahertz bandwidth by means of high frequency scanning force microscope testing
Author :
Leyk, A. ; Kubalek, E.
Author_Institution :
Fachgebiet Werkstoffe der Elektrotechnik, Gerhard-Mercator-Univ., Duisburg, Germany
fDate :
11/23/1995 12:00:00 AM
Abstract :
High frequency scanning force microscope (HFSFM) testing enables, among other measurements, the probing of device internal electric potential distributions within monolithic microwave integrated circuits (MMICs) with both high spatial and temporal resolution. Two planar components of the electric field can be calculated from this data and their local distribution can be mapped. For the first time 2D distributions of electric field components on an interdigital capacitor within an MMIC at frequencies up to 6 GHz were evaluated from HFSFM potential measurements, demonstrating the submicrometre spatial resolution and gigahertz bandwidth of this new MMIC internal electric field mapping technique
Keywords :
MMIC; atomic force microscopy; electric field measurement; integrated circuit testing; microwave measurement; 2D distributions; 6 GHz; HF scanning force microscope testing; MMIC internal electric field mapping; electric field components; electric potential distributions; gigahertz bandwidth; interdigital capacitor; local distribution mapping; monolithic microwave integrated circuits; submicron spatial resolution;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951442
