DocumentCode :
121261
Title :
Miniature fiber facet atomic force microscope using photonic crystal sensors
Author :
Gellineau, Antonio ; Yu-Po Wong ; Wang, Aiping ; Butte, Manish J. ; Solgaard, Olav
Author_Institution :
Stanford Univ., Stanford, CA, USA
fYear :
2014
fDate :
17-21 Aug. 2014
Firstpage :
3
Lastpage :
4
Abstract :
A miniaturized Atomic Force Microscope is fabricated on the facet of an optical fiber. Photonic crystal mirrors are integrated into the fabrication creating a Fabry Perot sensor for sensitive force measurements that verify the probe´s ability to resolve forces down to 8 pN/Hz0.5. This AFM form factor enables a path towards in-vivo, high-bandwidth and non-contact AFM imaging.
Keywords :
Fabry-Perot resonators; atomic force microscopy; fibre optic sensors; force measurement; mirrors; photonic crystals; AFM form factor; Fabry Perot sensor; miniature fiber facet atomic force microscope; noncontact AFM imaging; optical fiber; photonic crystal mirrors; photonic crystal sensors; sensitive force measurements; Force; Force measurement; Mirrors; Optical fiber sensors; Optical fibers; Probes; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
ISSN :
2160-5033
Print_ISBN :
978-0-9928-4140-9
Type :
conf
DOI :
10.1109/OMN.2014.6924510
Filename :
6924510
Link To Document :
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