Title :
Estimation of diaphragm deformation induced by molecuar adsorption on mems optical interferometric biosensor
Author :
Takahashi, Koichi ; Ozawa, Ryuta ; Ishida, Makoto ; Sawada, Kazuaki
Author_Institution :
Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
We have recently developed a surface stress sensor based on a MEMS FabryPerot interferometer integrated with a photodiode, which utilizes the nonlinear optical transmittance change in the FabryPerot interference to enhance the sensitivity of the surface stress. Parylene-C was used as a deformable membrane in the sensor because of negligible residual stress and low Young´s modulus of 2.8 GPa, which provides a large deformation with respect to molecular adsorption. After immobilization of 2-pg anti-BSA on the FabryPerot sensor, we measured about 50 nm deformation by surface profiler and reflection spectrum.
Keywords :
Fabry-Perot interferometers; Young´s modulus; adsorption; biosensors; deformation; diaphragms; integrated optics; membranes; micro-optics; microsensors; nonlinear optics; organic compounds; photodiodes; reflectivity; stress measurement; visible spectra; 2-pg anti-BSA; MEMS Fabry-Perot interferometer; MEMS optical interferometric biosensor; Parylene-C; Young´s modulus; deformable membrane; diaphragm deformation; immobilization; molecular adsorption; nonlinear optical transmittance; photodiode; reflection spectrum; surface profiler; surface stress sensor; Biomedical optical imaging; Micromechanical devices; Optical interferometry; Optical reflection; Optical sensors; Optical surface waves; Stress;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924511
