DocumentCode
1212840
Title
Current-induced unidirectional migration of Si at Al/Si contact
Author
Du, C.-H. ; Fujishima, M. ; Hoh, K.
Author_Institution
Dept. of Electron. Eng., Tokyo Univ., Japan
Volume
31
Issue
24
fYear
1995
fDate
11/23/1995 12:00:00 AM
Firstpage
2125
Lastpage
2127
Abstract
The invasion of Si atoms along the electron flow at a Al/Si contact was observed. The velocity and the amount of migrating Si atoms in the Al line were evaluated. It can be considered that the accumulation of Al vacancies at the contact owing to the electromigration, provides sites for Si atoms to occupy via thermal diffusion and electromigration
Keywords
aluminium; electromigration; elemental semiconductors; metallisation; silicon; thermal diffusion; vacancies (crystal); Al line; Al-Si; Al/Si contact; current-induced unidirectional migration; electromigration; electron flow; thermal diffusion; vacancies;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19951421
Filename
480751
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