Title :
Current-induced unidirectional migration of Si at Al/Si contact
Author :
Du, C.-H. ; Fujishima, M. ; Hoh, K.
Author_Institution :
Dept. of Electron. Eng., Tokyo Univ., Japan
fDate :
11/23/1995 12:00:00 AM
Abstract :
The invasion of Si atoms along the electron flow at a Al/Si contact was observed. The velocity and the amount of migrating Si atoms in the Al line were evaluated. It can be considered that the accumulation of Al vacancies at the contact owing to the electromigration, provides sites for Si atoms to occupy via thermal diffusion and electromigration
Keywords :
aluminium; electromigration; elemental semiconductors; metallisation; silicon; thermal diffusion; vacancies (crystal); Al line; Al-Si; Al/Si contact; current-induced unidirectional migration; electromigration; electron flow; thermal diffusion; vacancies;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951421