Double-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy

Author

Kogita, Yusuke ; Hirai, Yuki ; Tabata, Osamu ; Tsuchiya, Takao

Author_Institution

Kyoto Univ., Kyoto, Japan

fYear

2014

fDate

17-21 Aug. 2014

Firstpage

65

Lastpage

66

Abstract

A double-side-drive MEMS electrostatic optical chopper for time-resolved Raman spectroscopy to evaluate local dynamic stress in MEMS resonators has been proposed. The chopper is used as a mechanical pulse width modulator for the incident laser. The advantages are; 1) mechanical chopping, which can maintain the quality of source gas laser 2) small size for easy installation in commercial Raman spectrometer, 3) low cost by mass production. The chopper was fabricated using SOG structure. The measured response time was 50 μs and the measured incident laser shows the laser is modulated by MEMS optical chopper.

Keywords

Raman spectroscopy; electrostatic devices; gas lasers; internal stresses; micro-optics; micromechanical resonators; optical elements; MEMS resonators; SOG structure; Si-SiO₂; commercial Raman spectrometer; double-side-drive MEMS electrostatic optical chopper; incident laser; local dynamic stress; mass production; mechanical chopping; mechanical pulse width modulator; silicon on glass wafer; source gas laser; time-resolved Raman spectroscopy; Choppers (circuits); Micromechanical devices; Optical device fabrication; Optical modulation; Optical pulses; Optical resonators; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2014 International Conference on

Conference_Location

Glasgow

ISSN

2160-5033

Print_ISBN

978-0-9928-4140-9

Type

conf

DOI

10.1109/OMN.2014.6924545

Filename

6924545