Title :
Double-side-drive electrostatic optical chopper for time-resolved Raman spectroscopy
Author :
Kogita, Yusuke ; Hirai, Yuki ; Tabata, Osamu ; Tsuchiya, Takao
Author_Institution :
Kyoto Univ., Kyoto, Japan
Abstract :
A double-side-drive MEMS electrostatic optical chopper for time-resolved Raman spectroscopy to evaluate local dynamic stress in MEMS resonators has been proposed. The chopper is used as a mechanical pulse width modulator for the incident laser. The advantages are; 1) mechanical chopping, which can maintain the quality of source gas laser 2) small size for easy installation in commercial Raman spectrometer, 3) low cost by mass production. The chopper was fabricated using SOG structure. The measured response time was 50 μs and the measured incident laser shows the laser is modulated by MEMS optical chopper.
Keywords :
Raman spectroscopy; electrostatic devices; gas lasers; internal stresses; micro-optics; micromechanical resonators; optical elements; MEMS resonators; SOG structure; Si-SiO2; commercial Raman spectrometer; double-side-drive MEMS electrostatic optical chopper; incident laser; local dynamic stress; mass production; mechanical chopping; mechanical pulse width modulator; silicon on glass wafer; source gas laser; time-resolved Raman spectroscopy; Choppers (circuits); Micromechanical devices; Optical device fabrication; Optical modulation; Optical pulses; Optical resonators; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924545
