Scanning angle control of the optical micro scanner actuated by electrostatic force

The optical micro scanner is used for various applications, but its scanning performance is affected by temperature. In this paper, we report the temperature dependence of the optical scan angle and the way to control it. It was found that the optical scan angle became small when the temperature rose. However, it was possible to make the optical scan angle constant by regulating the DC voltage that was applied between two comb-electrodes of the optical micro scanner.