• DocumentCode
    1213051
  • Title

    Interferometric determination of the diameter of a silicon sphere using a direct optical frequency tuning system

  • Author

    Kuramoto, Naoki ; Fujii, Kenichi

  • Author_Institution
    Nat. Metrol. Inst. of Japan/Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan
  • Volume
    52
  • Issue
    2
  • fYear
    2003
  • fDate
    4/1/2003 12:00:00 AM
  • Firstpage
    631
  • Lastpage
    635
  • Abstract
    A new interferometer with a direct optical frequency tuning system using a phase-lock loop (PLL) offset locking has been developed to accurately measure the volumes of 1-kg single crystal silicon spheres. Three lasers are used in this system. The first one is an iodine-stabilized He-Ne laser, which is used as a reference laser. The second one is an offset-locked He-Ne laser whose optical frequency is offset-locked to the reference laser. The third one is an external cavity diode laser whose optical frequency is offset-locked to the offset-locked He-Ne laser by a PLL circuit. By changing the offset frequency between the diode laser and the offset-locked He-Ne laser, the optical frequency of the diode laser can be tuned continuously over a frequency range of 19 GHz and stabilized at a desired frequency with an uncertainty of 900 kHz within an integration time of 1/30 s. Accurate optical frequency changes in the diode laser produced by this system have been used to measure the sphere diameter by phase-shifting interferometry. Outlines of the interferometer and the frequency tuning system are presented. Preliminary results of the diameter measurement for a silicon sphere are also presented.
  • Keywords
    diameter measurement; optical tuning; phase locked loops; phase shifting interferometry; silicon; volume measurement; 1 kg; Si; diameter measurement; direct optical frequency tuning system; external cavity diode laser; iodine-stabilized He-Ne laser; phase-lock loop offset locking; phase-shifting interferometry; single crystal silicon sphere; volume measurement; Diode lasers; Frequency measurement; Laser tuning; Optical interferometry; Optical tuning; Phase locked loops; Phase measurement; Phase shifting interferometry; Silicon; Volume measurement;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.2003.811683
  • Filename
    1202112