Title :
X-ray irradiation test of a MEMS-based X-ray optic
Author :
Ogawa, Tomomi ; Ezoe, Yuichiro ; Kakiuchi, Takuya ; Ikuta, Masahiro ; Sato, Mitsuhisa ; Ohashi, Takaya ; Mitsuishi, Ikuyuki ; Mitsuda, Kazuhisa ; Morishita, Kohei ; Nakajima, Kensuke
Author_Institution :
Tokyo Metropolitan Univ., Tokyo, Japan
Abstract :
MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm2 both of which are 3 and 40 times better than those in the first test.
Keywords :
X-ray optics; micro-optics; micromechanical devices; MEMS; Wolter type-I optic; X-ray irradiation test; X-ray optic; space missions; Accuracy; Fabrication; Micromechanical devices; Optics; Radiation effects; Silicon; X-ray imaging; Wolter type-I; X-ray optics;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924555
