Title :
Shield effect of floating electrode for power efficient micro-plasma VUV light source
Author :
Sato, Ryota ; Yasumatsu, Daisuke ; Kumagai, Shinya ; Hori, Muneo ; Sasaki, Motoharu
Author_Institution :
Toyota Technol. Inst., Toyota, Japan
Abstract :
MEMS plasma source for VUV light source is improved. The floating electrode has been introduced for the power efficient discharging. Shielding the major part of that electrode is found to be further effective for saving the power. The ignition and sustaining powers are 5 and 4.5W, respectively. They are lower than the value for ICP type micro-plasma reported including the bulk setup.
Keywords :
electrodes; ignition; micromechanical devices; plasma sources; shielding; ultraviolet sources; ICP type microplasma; MEMS plasma source; floating electrode; ignition; power 4.5 W to 5 W; power efficient discharging; power efficient microplasma VUV light source; shield effect; Coils; Electrodes; Ignition; Iterative closest point algorithm; Light sources; Micromechanical devices; Plasmas;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924563
