DocumentCode
121315
Title
Development of visored MEMS shutter array for cryogenic environment
Author
Takahashi, Tatsuro ; Mita, M. ; Konishi, M. ; Motohara, K. ; Kobayashi, Nao ; Kashikawa, N. ; Fujita, Hideaki ; Toshiyoshi, Hiroshi
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
147
Lastpage
148
Abstract
We report the development of the visored shutter structure for astronomical instrument and the electrostatic operation in a 140K cryogenic environment without thermo-mechanical failure.
Keywords
astronomical instruments; cryogenics; micro-optomechanical devices; optical arrays; astronomical instrument; cryogenic environment; visored MEMS shutter array; Arrays; Cryogenics; Electrostatics; Metals; Micromechanical devices; Nanophotonics; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924564
Filename
6924564
Link To Document