DocumentCode
121317
Title
MEMS corner-cube transmission-type optical phase modulator in DRIE technology
Author
Khalil, Kamal ; Hassan, Karim ; Shebl, Ahmed ; Soliman, M. ; Eltagoury, Yomna M. ; Al-Otaibi, Mohammed ; Sabry, Yasser M. ; Khalil, Diaa
Author_Institution
Ain Shams Univ., Cairo, Egypt
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
151
Lastpage
152
Abstract
In this work we report an in-line, transmission-type corner-cube optical Phase Modulator (PM) fabricated by DRIE technology on an SOI substrate. The PM has a resonance frequency of 11.2 kHz and a maximum travel range of 5.5 μm. The structure is tested using single-mode fibers in a Mach-Zehnder interferometer configuration at the wavelength of 1550 nm demonstrating the capability of producing both low and high modulation indices by varying the applied voltage.
Keywords
Mach-Zehnder interferometers; micro-optomechanical devices; optical fabrication; optical modulation; silicon-on-insulator; DRIE technology; MEMS corner-cube transmission-type optical phase modulator; Mach-Zehnder interferometer; SOI substrate; Si; frequency 11.2 kHz; resonance frequency; wavelength 1550 nm; Optical device fabrication; Optical fibers; Optical filters; Optical interferometry; Optical modulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924566
Filename
6924566
Link To Document