Title :
MEMS corner-cube transmission-type optical phase modulator in DRIE technology
Author :
Khalil, Kamal ; Hassan, Karim ; Shebl, Ahmed ; Soliman, M. ; Eltagoury, Yomna M. ; Al-Otaibi, Mohammed ; Sabry, Yasser M. ; Khalil, Diaa
Author_Institution :
Ain Shams Univ., Cairo, Egypt
Abstract :
In this work we report an in-line, transmission-type corner-cube optical Phase Modulator (PM) fabricated by DRIE technology on an SOI substrate. The PM has a resonance frequency of 11.2 kHz and a maximum travel range of 5.5 μm. The structure is tested using single-mode fibers in a Mach-Zehnder interferometer configuration at the wavelength of 1550 nm demonstrating the capability of producing both low and high modulation indices by varying the applied voltage.
Keywords :
Mach-Zehnder interferometers; micro-optomechanical devices; optical fabrication; optical modulation; silicon-on-insulator; DRIE technology; MEMS corner-cube transmission-type optical phase modulator; Mach-Zehnder interferometer; SOI substrate; Si; frequency 11.2 kHz; resonance frequency; wavelength 1550 nm; Optical device fabrication; Optical fibers; Optical filters; Optical interferometry; Optical modulation;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924566
