Title :
Particle and Energy Fluxes in a Two-Chamber Plasma Source
Author :
Kolev, Stanimir ; Shivarova, Antonia ; Tarnev, Khristo ; Tsankov, Tsanko
Author_Institution :
Fac. of Phys., Sofia Univ., Sofia
Abstract :
A regime of discharge maintenance with a net dc current flowing through the plasma is established in the gas-pressure range that is usually governed by ambipolar diffusion. The conclusion is based on results from a 2-D fluid-plasma model developed for describing discharge maintenance in a two-chamber plasma source with metal walls.
Keywords :
discharges (electric); plasma sources; plasma transport processes; ambipolar diffusion; discharge; energy fluxes; fluid-plasma model; net dc current; particle fluxes; particle two-chamber plasma source; Charged particle fluxes; electron energy flux; high-frequency discharges; remote plasma sources; tandem plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.922438
