Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan

In this study, we propose a dual-axis hybrid-MEMS mirror for large-area 2D raster scanner composed of fast and slow driving gimbals. For simple fabrication and high driving performance, an outer gimbal for slow and large scanning has polymer SU-8 hinges with low rigidity, and an inner gimbal for fast scanning has Si hinges with high rigidity. The outer gimbal deflected over ±14deg. at non-resonant frequency of 60Hz refresh rate, and the inner one ±1deg. at the resonant frequency 22.9kHz. The 2D raster scanning of the fabricated mirror was demonstrated.