Title :
Integration of the innovative 3D micro prism design and fabrication technology for a pico-projection system
Author :
Kuo-Yung Hung ; Yun-Ju Chuang ; Yi-Wei Tsai ; Shih-Hao Huang ; Jheng-Huai Huang
Author_Institution :
Dept. of Mech. Eng., Ming Chi Univ. of Technol., Taipei, Taiwan
Abstract :
In this study, micro-opto-electro-mechanical systems (MOEMS) technology was used to design an innovative and compact 10 × 6 × 1.5 mm) 3D micro prism, featuring three distinct 45° inclined optical surfaces that simplify the optical design and dimensions of the micro-projection system. The 3D micro-prism manufacturing process is based on a process involving three time inclined exposures and thickfilm (1.5 mm). The roughness of the inclined surface reached 29.8 nm, improving the 407-nm surface roughness yielded by computer numerical control (CNC) processing.
Keywords :
micro-optics; micro-optomechanical devices; microfabrication; optical prisms; surface roughness; 45° inclined optical surfaces; computer numerical control processing; fabrication technology; inclined surface roughness; innovative 3D micro prism design; micro-opto-electro-mechanical systems; pico-projection system; thickfilm; time inclined exposures; Optical device fabrication; Optical interferometry; Optical reflection; Rough surfaces; Surface roughness; Surface treatment; Three-dimensional displays; MOEMS; Pico projector; Thickfilm;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924579
