Title :
Design and fabrication of InP free-standing optical waveguides for MEMS
Author :
Ng, Wing H. ; Podoliak, Nina ; Stewart, William ; Horak, P. ; Huiyun Liu ; Kenyon, A.J.
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. Coll. London, London, UK
Abstract :
We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation functionality to the waveguides. The device is designed to be used as an optical buffer for telecommunication applications.
Keywords :
indium compounds; micro-optics; micromechanical devices; optical fabrication; optical waveguides; InP; device layer; electrodes; free-standing optical waveguides; optical MEMS device; optical buffer; telecommunication; Indium phosphide; Micromechanical devices; Optical buffering; Optical device fabrication; Optical waveguides;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924583
