Title :
Electrothermally actuated MEMS terahertz metamaterial
Author :
ChongPei Ho ; Pitchappa, Prakash ; Yu-Sheng Lin ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW.
Keywords :
electromagnetic actuators; microactuators; terahertz metamaterials; tuning; MEMS; continuously tunable Omega-ring teratahertz metamaterial; integrating electrothermal actuator; power 500 mW; repeatability; resonant frequency; stroke; tunability; tuning range; Aluminum oxide; Heating; Metamaterials; Micromechanical devices; Resonant frequency; Temperature measurement; Tuning; MEMS; Terahertz; electrothermal actuation; metamaterial;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924588
