DocumentCode
121339
Title
Electrothermally actuated MEMS terahertz metamaterial
Author
ChongPei Ho ; Pitchappa, Prakash ; Yu-Sheng Lin ; Chengkuo Lee
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
111
Lastpage
112
Abstract
We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW.
Keywords
electromagnetic actuators; microactuators; terahertz metamaterials; tuning; MEMS; continuously tunable Omega-ring teratahertz metamaterial; integrating electrothermal actuator; power 500 mW; repeatability; resonant frequency; stroke; tunability; tuning range; Aluminum oxide; Heating; Metamaterials; Micromechanical devices; Resonant frequency; Temperature measurement; Tuning; MEMS; Terahertz; electrothermal actuation; metamaterial;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924588
Filename
6924588
Link To Document