Title :
High performance label-free biosensing by all dielectric metamaterial
Author :
Sang-Gil Park ; Ki-Hun Jeong
Author_Institution :
Dept. of Bio & Brain Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
This work presents high performance label-free biosensor by using an all dielectric metamaterial. The all dielectric metamaterial consists of nanohole arrays in rectangular lattice on a thin silicon substrate. The nanohole arrays were fabricated by using e-beam lithography and silicon reactive ion etching. The all dielectric metamaterial biosensor shows high sensitivity and high figure-of-merit of 21. This device can offer new opportunity for biosensing with high performance and reusability.
Keywords :
biosensors; electron beam lithography; optical arrays; optical lattices; optical metamaterials; optical sensors; silicon; sputter etching; surface plasmon resonance; all dielectric metamaterial; biosensor; e-beam lithography; label-free biosensing; nanohole arrays; rectangular lattice; silicon reactive ion etching; thin silicon substrate; Biomedical optical imaging; Biosensors; Dielectrics; Magnetic materials; Metamaterials; Optical device fabrication; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924590
