Title :
Linear stepping microactuator for hyperspectral systems
Author :
Mehner, Hannes ; Endrody, Csaba ; Hoffmann, Marco
Author_Institution :
Tech. Univ. Ilmenau, Ilmenau, Germany
Abstract :
We present an electrostatic inch-worm stepping drive for optical filter alignment in hyperspectral imaging systems requiring a large displacement range of about 140 μm and a step size of 10 μm. The shifted pinhole filter greatly improves the optical resolution of an innovative hyperspectral imaging system [1]. The fabrication is based on SOI (silicon on insulator) technology. The pinhole array is separately mounted into the driving frame.
Keywords :
electrostatic actuators; hyperspectral imaging; image processing; microactuators; optical filters; silicon-on-insulator; SOI technology; Si; electrostatic inch-worm stepping drive; hyperspectral imaging systems; linear stepping microactuator; optical filter alignment; optical resolution; pinhole array; shifted pinhole filter; Arrays; Electrodes; High-speed optical techniques; Hyperspectral imaging; Optical device fabrication; Optical filters; Optical imaging;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924597
