• DocumentCode
    121363
  • Title

    Resonant PZT MEMS scanners with integrated angle sensors

  • Author

    Baran, Utku ; Holmstrom, Sture ; Brown, Dean ; Davis, Wyatt ; Cakmak, Onur ; Urey, Hakan

  • Author_Institution
    Koc Univ., Istanbul, Turkey
  • fYear
    2014
  • fDate
    17-21 Aug. 2014
  • Firstpage
    99
  • Lastpage
    100
  • Abstract
    Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
  • Keywords
    angular measurement; lead compounds; micro-optics; micromechanical devices; optical scanners; MEMS laser scanners; PZT; PZT MEMS scanners; angle sensors; closed-loop drive; mechanical coupling; mirror rotation; Mechanical sensors; Micromechanical devices; Mirrors; Optical sensors; Resonant frequency; Sensor phenomena and characterization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
  • Conference_Location
    Glasgow
  • ISSN
    2160-5033
  • Print_ISBN
    978-0-9928-4140-9
  • Type

    conf

  • DOI
    10.1109/OMN.2014.6924612
  • Filename
    6924612
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=121363