DocumentCode
121364
Title
λ/8 Precision parabolic resonant varifocal mirror
Author
Nakazawa, K. ; Sasaki, T. ; Hane, Kazuhiro
Author_Institution
Tohoku Univ., Sendai, Japan
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
101
Lastpage
102
Abstract
An λ/8 precision parabolic resonant varifocal mirror is described. The varifocal mirror is electrostatically driven and made of single crystalline silicon. The varifocal mirrors having two types of circumferential structure were fabricated. One is clamped edge, the other is close to simply supported edge. The mirror surface profiles were measured at maximum oscillation amplitude. The deviation from parabola is smaller than λ/8 in the case of the mirror with simply supported circumference at the wavelength longer than 500 nm.
Keywords
elemental semiconductors; microfabrication; micromirrors; silicon; Si; circumferential structure; clamped edge structure; electrostatically driven varifocal mirror; maximum oscillation amplitude; mirror surface profiles; precision parabolic resonant varifocal mirror; single crystalline silicon; supported edge structure; Eigenvalues and eigenfunctions; Frequency measurement; Micromechanical devices; Mirrors; Optical device fabrication; Optical surface waves; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924613
Filename
6924613
Link To Document