Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Digital force/weight sensors have some advantages over their analog counterparts. This paper describes the optimization and implementation of a novel digital force/weight sensor that uses a thickness-shear quartz crystal resonator (QCR) and a unique compliant mechanism. The compliant mechanism consists of eight flexure hinges and is used to fix the sensitive QCR and transfer the measured force. Advantages of such a sensor include inherent digital output, high resolution, high reliability, and low cost. Due to the complex structure and the multivariables of the compliant mechanism, conventional trial methods are inefficient in determining the dimensions. To solve this problem, an optimization method has been developed by employing rigid-body model, finite element method, and nonlinear programming techniques. Experimental results show that it is more efficient than trial methods in optimizing complex compliant mechanism-based sensors. This method can be used as a generic method for optimizing force sensors using compliant mechanisms, to obtain the desired specifications.
Keywords :
crystal resonators; finite element analysis; force sensors; mass measurement; nonlinear programming; optimisation; digital force sensor; digital weight sensor; finite element method; force measurement; nonlinear programming; optimization method; quartz crystal resonator; rigid body model; Chemical industry; Chemical sensors; Costs; Fasteners; Force measurement; Force sensors; Manufacturing; Mechanical factors; Mechanical sensors; Optimization methods; Compliant mechanism; flexure hinge; force sensor; optimization; quartz resonator;
