Title :
Athermal arrayed-waveguide grating multi/demultiplexers composed of TiO2--SiO2 waveguides on Si
Author :
Hirota, Hidenobu ; Itoh, Mikitaka ; Oguma, Manabu ; Hibino, Yoshinori
Author_Institution :
NTT Photonics Labs., NTT Corp., Kanagawa Pref., Japan
Abstract :
We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO2-doped SiO2 glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO2 concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm/°C at a TiO2 concentration of 66 mol% and an annealing temperature of 900°C.
Keywords :
annealing; arrayed waveguide gratings; demultiplexing equipment; multiplexing equipment; optical communication equipment; optical design techniques; optical fabrication; optical glass; rib waveguides; silicon compounds; titanium compounds; wavelength division multiplexing; 900 degC; AWG design; Si; TiO2 concentration; TiO2-SiO2; TiO2-SiO2 waveguides; annealing temperature; arrayed-waveguide grating; athermal AWG; demultiplexers; glass rib waveguides; multiplexers; optical fabrication; silicon substrate; wavelength division multiplexing; wavelength temperature coefficients; Annealing; Arrayed waveguide gratings; Glass; Optical films; Optical planar waveguides; Optical waveguides; Refractive index; Substrates; Temperature dependence; Thermal expansion; Optical planar waveguides; optical waveguides; wavelength-division multiplexing;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.839449
