Title :
Miniature fiber-optic pressure sensor
Author :
Yizheng Zhu ; Anbo Wang
Author_Institution :
Bradley Dept. of Electr. & Comput. Eng., State Univ., Blacksburg, VA, USA
Abstract :
This letter presents a miniature fiber-optic pressure sensor fabricated directly on the tip of a fiber. The sensor measures only 125 μm in diameter. A Fabry-Pe/spl acute/rot cavity and a thin silica diaphragm are fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The sensor has been tested for static pressure response, showing excellent repeatability and no hysteresis. Its all-fused-silica structure lends it great potential for high-temperature pressure measurements. Pressure testing results at 530/spl deg/C are given. The sensor may also find uses in medical applications.
Keywords :
Fabry-Perot interferometers; etching; fibre optic sensors; micro-optics; optical design techniques; optical fibre fabrication; optical fibre testing; pressure sensors; splicing; 125 mum; 530 degC; Fabry-Perot cavity; cleaving; fiber-optic pressure sensor miniature; fusion slicing; sensor design; sensor testing; thin silica diaphragm; wet chemical etching; Chemical sensors; Hysteresis; Interference; Optical fiber sensors; Optical fiber testing; Pattern analysis; Pressure measurement; Silicon compounds; Splicing; Wet etching; Fabry–PÉrot (F-P) interferometer; fiber-optic sensor; high temperature; miniature; pressure sensor;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.839002
