• DocumentCode
    1215296
  • Title

    Parameters of the Kinetic Layer of Arc-Discharge Cathode Region

  • Author

    Beilis, I.I.

  • Volume
    13
  • Issue
    5
  • fYear
    1985
  • Firstpage
    288
  • Lastpage
    290
  • Abstract
    The model is presented and the equation system is obtained which describes the nonequilibrium (Knudsen´s) region of a cathode jet at the arc discharge burning in vapors of electrode material. The nonequilibrium layer is formed as a result of streaming of cathode-erosion products in the medium with reduced pressure and presents the discontinuity surface of the hydrodynamical region. The equation system was obtained by analyzing the law of conservation of heavy particles in the layer. Calculation results are presented and parameters of a cathode jet in the kinetic layer are discussed. It is shown that this flow is not a free one and its parameters are dependent on energy release in the near-cathode region.
  • Keywords
    Atomic layer deposition; Cathodes; Electrodes; Equations; Kinetic theory; Plasma density; Plasma materials processing; Plasma properties; Plasma stability; Plasma temperature;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.1985.4316422
  • Filename
    4316422