DocumentCode
1215296
Title
Parameters of the Kinetic Layer of Arc-Discharge Cathode Region
Author
Beilis, I.I.
Volume
13
Issue
5
fYear
1985
Firstpage
288
Lastpage
290
Abstract
The model is presented and the equation system is obtained which describes the nonequilibrium (Knudsen´s) region of a cathode jet at the arc discharge burning in vapors of electrode material. The nonequilibrium layer is formed as a result of streaming of cathode-erosion products in the medium with reduced pressure and presents the discontinuity surface of the hydrodynamical region. The equation system was obtained by analyzing the law of conservation of heavy particles in the layer. Calculation results are presented and parameters of a cathode jet in the kinetic layer are discussed. It is shown that this flow is not a free one and its parameters are dependent on energy release in the near-cathode region.
Keywords
Atomic layer deposition; Cathodes; Electrodes; Equations; Kinetic theory; Plasma density; Plasma materials processing; Plasma properties; Plasma stability; Plasma temperature;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.1985.4316422
Filename
4316422
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