Title :
Temperature variation mapping of a microelectromechanical system by thermoreflectance imaging
Author :
Grauby, Stéphane ; Dilhaire, Stefan ; Jorez, Sébastien ; Claeys, Wilfrid
Author_Institution :
CPMOH-Univ. Bordeaux, Talence, France
Abstract :
We present in this letter a cost effective noncontact imaging technique well adapted to measure the temperature variations on microelectromechanical systems. The setup is tested on a microheater constituted of a polysilicon resistor deposited on a dielectric membrane. Results concerning the temperature variations of this device are compared on one hand with simulation predictions, and on the other hand with thermoreflectance point measurements. From thermoreflectance images, we also estimate the values of the thermoreflectance coefficients of the polysilicon and of the dielectric.
Keywords :
infrared imaging; micromechanical devices; temperature measurement; thermoreflectance; dielectric membrane; microelectromechanical system; microheater; noncontact imaging; polysilicon resistor; temperature variation mapping; temperature variation measurement; thermoreflectance coefficients; thermoreflectance imaging; thermoreflectance point measurements; Costs; Dielectric measurements; Light emitting diodes; Microelectromechanical systems; Micromechanical devices; Reflectivity; Spatial resolution; Temperature measurement; Thermal stresses; Thermoreflectance imaging;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2004.841468
