DocumentCode
1216090
Title
The Spatial and Temporal Evolution of the Glow in an RF Discharge
Author
Hebner, G.A. ; Verdeyen, J.T.
Volume
14
Issue
2
fYear
1986
fDate
4/1/1986 12:00:00 AM
Firstpage
132
Lastpage
136
Abstract
The temporal and spatial evolution of the glow in a 1.0- and 2.6-MHz radio-frequency (RF) excited discharge has been photographed with a high-speed framing camera. Evidence is presented showing electrons with a ballistic behavior in the body of the glow and a time delay between the maximum optical intensity of the glow and the maximum RF voltage. The effect of the dc self-bias on the glow is also shown. The implications of these observations on the dynamics of the ion motion in the plasma are discussed.
Keywords
Cameras; Electrodes; Helium; Plasma applications; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sheaths; Radio frequency; Voltage;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.1986.4316515
Filename
4316515
Link To Document