DocumentCode :
1216271
Title :
Generation and Measurements of Ion Species from Vacuum Arcs
Author :
Len, L.K. ; Burkhart, C. ; Cooper, Gary W. ; Humphries, Stanley, Jr. ; Savage, M. ; Woodall, David M.
Volume :
14
Issue :
3
fYear :
1986
fDate :
6/1/1986 12:00:00 AM
Firstpage :
256
Lastpage :
260
Abstract :
We have measured the ion flux for different electrode materials in a vacuum arc. The vacuum arc has a point-plane geometry. The ion species in the generated plasma are identified using a time-of-flight (TOF) spectrometer. Ion species that have been generated to date include D+, Mg+, Mg++, Al+, Al++, Al+++, Ti+, Ti++, Ni+, Ni++, Cu+, Cu++, Zn+, Zn++, and In+. We found that in all cases, the ion flux measured is directly proportional to the interelectrode gap spacing and to the arc current. Typical current densities measured were ~300 mA · cm-2 at a distance of 10 cm from the gap for 150-¿s pulse. The study will be used for the development of a multiple-arc array source for application to intense ion beam generation.
Keywords :
Current density; Current measurement; Density measurement; Electrodes; Geometry; Plasma materials processing; Plasma measurements; Pulse measurements; Spectroscopy; Vacuum arcs;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.1986.4316537
Filename :
4316537
Link To Document :
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