Title :
Definition of the Geometric Area of a Microelectrode Tip by Plasma Etching of Parylene
Author :
Levy, Bruce P. ; Campbell, Steven L. ; Rose, Timothy L.
Author_Institution :
EIC Laboratories, Inc.
Abstract :
The geometric area of the tip of an intracortical stimulation electrode can be defined by combining photoresist masking with oxygen plasma etching of Parylene.1 The method was tested with both capacitor and iridium oxide electrodes and caused no significant degradation of the electrical properties of the electrode.
Keywords :
Capacitors; Electrodes; Etching; Microelectrodes; Plasma applications; Plasma materials processing; Plasma properties; Resists; Shafts; Testing; Electric Stimulation; Humans; Mathematics; Microelectrodes; Polymers; Xylenes;
Journal_Title :
Biomedical Engineering, IEEE Transactions on
DOI :
10.1109/TBME.1986.325872
