• DocumentCode
    1216583
  • Title

    Definition of the Geometric Area of a Microelectrode Tip by Plasma Etching of Parylene

  • Author

    Levy, Bruce P. ; Campbell, Steven L. ; Rose, Timothy L.

  • Author_Institution
    EIC Laboratories, Inc.
  • Issue
    11
  • fYear
    1986
  • Firstpage
    1046
  • Lastpage
    1049
  • Abstract
    The geometric area of the tip of an intracortical stimulation electrode can be defined by combining photoresist masking with oxygen plasma etching of Parylene.1 The method was tested with both capacitor and iridium oxide electrodes and caused no significant degradation of the electrical properties of the electrode.
  • Keywords
    Capacitors; Electrodes; Etching; Microelectrodes; Plasma applications; Plasma materials processing; Plasma properties; Resists; Shafts; Testing; Electric Stimulation; Humans; Mathematics; Microelectrodes; Polymers; Xylenes;
  • fLanguage
    English
  • Journal_Title
    Biomedical Engineering, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9294
  • Type

    jour

  • DOI
    10.1109/TBME.1986.325872
  • Filename
    4122205
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1216583