Novel fabrication of Si thin film for solar cell applications

Author

Chien-Ting Liu ; Thiyagu, Subramani ; Chen-Chih Hsueh ; Hong-Jang Syu ; Song-Ting Yang ; Ching-Fuh Lin

Author_Institution

Grad. Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2014

fDate

8-13 June 2014

Firstpage

1284

Lastpage

1286

Abstract

We demonstrate a novel method to fabricate crystalline silicon thin film for solar cell applications. It can reduce material cost and energy consumption. Here, we adopt a multi-step metal-assisted chemical etching procedure by using silver as catalyst to form silicon thin film. Through engineering the etching direction, this method provides possibility to fabricate transferable silicon thin film. Moreover, the substrate can be reused for further thin film fabrication.

Keywords

elemental semiconductors; etching; silicon; silver; solar cells; thin films; Ag; Si; crystalline thin film fabrication; energy consumption; etching direction; material cost; multistep metal-assisted chemical etching procedure; solar cell applications; Etching; Hafnium; Photovoltaic systems; Silicon; Silver; Solar energy; anisotropic etching; crystalline silicon thin film; electro-less metal deposition; isotropic etching; metal-assisted chemical etching; multi-step metal-assisted chemical etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th

Conference_Location

Denver, CO

Type

conf

DOI

10.1109/PVSC.2014.6925151

Filename

6925151