Title :
A novel integrable microvalve for refreshable Braille display system
Author :
Yobas, Levent ; Durand, Dominique M. ; Skebe, Gerard G. ; Lisy, Frederick J. ; Huff, Michael A.
Author_Institution :
Dept. of Biomed. Eng., Case Western Reserve Univ., Cleveland, OH, USA
fDate :
6/1/2003 12:00:00 AM
Abstract :
We introduce a novel integrable and electrostatic microvalve for the purpose of enabling a pneumatic refreshable Braille display system (RBDS). Physical design parameters of the microvalve such as orifice size, beam length, number of beams and beam profile are experimentally explored and found promising for use with the RBDS. Particularly, one design with an orifice of 70 μm×70 μm, beam length of 665 μm, and beam count of 20 is electrostatically closed against a differential pressure of 82.7 kPa with an applied voltage of 68 V-rms. Also introduced is a steady-state mechanical model of the microvalve established on a coupled solution of fluid and solid domains. The model and experimental test results have been used to calculate the unknown discharge coefficient, elastic deflection, and entrance pressure. The model reveals that some of the designs have remarkably low discharge coefficient and entrance pressure, implying that pressure loss occurs mostly through and around the inlet port even at fairly large supply pressures. Experimental observations concerning the practical use of the microvalve are discussed.
Keywords :
electropneumatic control equipment; electrostatic actuators; handicapped aids; haptic interfaces; micromachining; microvalves; sensory aids; 665 micron; 68 V; 70 micron; 82.7 kPa; applied voltage; beam count; beam length; beam profile; differential pressure; discharge coefficient; elastic deflection; electrostatic closure; entrance pressure; fluid-solid mechanics; inlet port; integrable electrostatic microvalve; orifice size; physical design parameters; pneumatic refreshable Braille display system; pressure loss; steady-state mechanical model; tactile display; Actuators; Auditory displays; Biomedical engineering; Computer displays; Electrostatics; Microphone arrays; Microvalves; Orifices; Pins; Temperature;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2003.811754