• DocumentCode
    121848
  • Title

    Effect of deposition temperature on reactively sputtered CdS:O

  • Author

    Grice, Corey R. ; Paudel, Naba R. ; Chuanxiao Xiao ; Yanfa Yan

  • Author_Institution
    Univ. of Toledo, Toledo, OH, USA
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1611
  • Lastpage
    1615
  • Abstract
    Thin films of CdS and CdS:O were deposited using RF magnetron sputtering at room temperature and at 270 °C in sputtering ambient with 0-4% O2 (balance Ar). These films were characterized with respect to their optical and structural properties. The samples were then subjected to a heat treatment similar to that experienced during CdTe closed space sublimation deposition, after which the samples were re-characterized.
  • Keywords
    II-VI semiconductors; cadmium compounds; heat treatment; oxygen; semiconductor growth; semiconductor thin films; sputter deposition; wide band gap semiconductors; CdS; CdS:O; RF magnetron sputtering; closed space sublimation deposition; deposition temperature effect; heat treatment; optical properties; reactive sputtering; structural properties; temperature 270 degC; temperature 293 K to 298 K; thin films; Indexes; Magnetic confinement; Magnetic cores; Magnetic properties; Magnetic resonance imaging; Sputtering; Temperature; CdS:O; RF sputtering; oxygenated cadmium sulfide; reactive sputtering; thin films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
  • Conference_Location
    Denver, CO
  • Type

    conf

  • DOI
    10.1109/PVSC.2014.6925228
  • Filename
    6925228
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=121848