Title :
Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications
Author :
Cho, Y.H. ; Ha, M.-L. ; Choi, W. ; Pyo, C. ; Kwon, Y.-S.
Author_Institution :
Sch. of Inf. & Commun. Eng., Mokwon Univ., Daejeon, South Korea
Abstract :
Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.
Keywords :
antenna radiation patterns; micromachining; micromechanical devices; microstrip antennas; microstrip lines; millimetre wave devices; Si; broadband wireless access; floating patch MEMS antennas; high resistivity silicon substrate; metallic posts; microelectromechanical system; microstrip lines; millimetre wave applications; radiation patterns; rectangular patches; reflection coefficients; surface micromachining technology;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20057307
