Millimetre-wave generation with semiconductor superlattice mounted in cavity fabricated by UV-photolithography and galvanoforming

A fabrication technique for a waveguide cavity with submillimetre dimensions is reported. The cavity was composed of galvanoformed nickel structures. A mould for the galvanoforming was made from a thick-film UV-photoresist. Using a semiconductor superlattice as active element, generation of millimetre-waves (170 GHz) was observed, but with subharmonics owing to as yet insufficient suppression of bias oscillations. The microstructuring technique may be suitable for the development of solid-state radiation sources up to THz frequencies.