DocumentCode
1219052
Title
Spatially resolved plasma emission and absorption coefficient measurements by an optical fiber probe
Author
Jin, Zhong-Jun ; Chan, Chung
Author_Institution
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA
Volume
17
Issue
6
fYear
1989
fDate
12/1/1989 12:00:00 AM
Firstpage
870
Lastpage
874
Abstract
The plasma emission and absorption coefficients were measured by means of two different techniques using an optical fiber probe in a parallel-plate RF glow discharges. The first technique can, in principle, provide three-dimensional resolution with the movement of the probe, while the second technique provides only a line-average measurement. The results of two different measurement methods and the practical limitations of the techniques are discussed
Keywords
glow discharges; high-frequency discharges; optical fibres; plasma diagnostic techniques; plasma diagnostics; plasma probes; optical fiber probe; parallel-plate RF glow discharges; spatially resolved plasma absorption coefficient; spatially resolved plasma emission coefficient; three-dimensional resolution; Absorption; Optical fibers; Optical films; Plasma applications; Plasma diagnostics; Plasma measurements; Plasma temperature; Probes; Spatial resolution; Stimulated emission;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.41225
Filename
41225
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