• DocumentCode
    1219370
  • Title

    Special issue on equipment and operations automation in the semiconductor industry

  • Volume
    6
  • Issue
    2
  • fYear
    2009
  • fDate
    4/1/2009 12:00:00 AM
  • Firstpage
    393
  • Lastpage
    393
  • Abstract
    Provides notice of upcoming special issue(s) of interest to practitioners and researchers.
  • fLanguage
    English
  • Journal_Title
    Automation Science and Engineering, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1545-5955
  • Type

    jour

  • DOI
    10.1109/TASE.2009.2019799
  • Filename
    4808321
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1219370