Title :
Parameterization of carrier mobility sum in silicon as a function of doping, temperature and injection level: Extension to p-type silicon
Author :
Zheng, P. ; Rougieux, Fiacre E. ; Macdonald, Daniel ; Cuevas, Andres
Author_Institution :
Res. Sch. of Eng., Australian Nat. Univ., Canberra, ACT, Australia
Abstract :
Based on contactless photoconductance measurements of silicon wafers, we have determined the sum of electron and hole mobilities as a function of doping, excess carrier concentration, and temperature. By using data measured on n-type silicon wafers with resistivity from 1Ω.cm to 100Ω.cm, we have previously developed a simple mathematical expression to describe the mobility sum as a function of carrier injection, wafer doping and temperature. In this paper, we provide experimental results for p-type silicon wafers from 150K to 450K and show that they are consistent with this parameterization. We show that our parameterization of the mobility sum in silicon is valid for both p-and n-type silicon for various carrier injection, wafer doping and temperature from 150K to 450K. The new parameterization is also an experimental validation of Klaassen´s and Dorkel-Leturcq´s models under carrier injection at different temperatures.
Keywords :
elemental semiconductors; mathematical analysis; silicon; Dorkel-Leturcq models; Klaassen models; Si; carrier injection; carrier mobility sum parameterization; contactless photoconductance measurements; electron mobilities; hole mobilities; mathematical expression; n-type silicon wafers; p-type silicon wafers; parameterization; silicon wafers; temperature 150 K to 450 K; wafer doping; Charge carrier density; Doping; Mathematical model; Semiconductor process modeling; Silicon; Temperature dependence; Temperature measurement; charge carrier mobility; mobility sum; silicon; temperature and injection dependent;
Conference_Titel :
Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
Conference_Location :
Denver, CO
DOI :
10.1109/PVSC.2014.6925391