Title :
A New Method for Measuring Breakdown and Maintenance Fields in Microwave Discharges
Author :
Nachman, Manfred
Author_Institution :
IEEE Jacques Spooner Department of Electrical Engineering Ecole Polytechnique Campus of the University of Montreal Montreal, Canada
Abstract :
A new experimental approach for comparative measurements of breakdown and maintenance electric fields in microwave discharges is described. The method is based on the analysis of the RF pulses transmitted to a matched load, in absence and in presence of the discharge, by the applicator employed for coupling the RF power to the gas under investigation. Results on breakdown and maintenance field in microwave discharges in nitrogen, at a frequency of 2.45 GHz, for flow and non-flow conditions, in the pressure range 0.5 to 6 torr, are reported.
Keywords :
Electric breakdown; Gases; Microwave devices; Microwave measurements; Microwave theory and techniques; Plasma chemistry; Pulsed power supplies; Radio frequency; Resonance; Solids;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.1977.4317063
