Title :
Electrochemical microsensors
Author_Institution :
Sch. of Chem. & Biochem., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
6/1/2003 12:00:00 AM
Abstract :
A critical review of recent developments in electrochemical microsensors is presented. The main emphasis is on chemiresistors and potentiometric microsensors. Both types of sensors have reached a degree of considerable maturity. It appears that the main future thrust can be expected in development of microfabricated sensing arrays based on these two principles.
Keywords :
electrochemical sensors; microsensors; chemiresistor; electrochemical microsensor; microfabricated sensing array; potentiometric microsensor; Charge carrier processes; Chemical sensors; Circuits; Conductivity; Current measurement; Doping; Electrical resistance measurement; Insulation; Microsensors; Surface morphology;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2003.813576
