High Performance, Low Energy Ion Source

An ion accelerator system using one or two fine mesh tungsten grids has been used in a magnetic multipole containment ion source to produce a continuous positive ion beam variable over a wide range of beam currents and accelerator voltages. The ion source plasma is low noise and uniform to ± 1% density variation over 9 cm diameter. Beams up to 4 cm × 4 cm have been extracted which have low divergence (±1%), uniform current density (±2%), small ion energy speed, beam ion energy variable from 200V to several thousand volts, and current densities variable from ¿A per cm2 to tens of milliamperes per cm2, limited only by acceleration grid power loading or sputtering.