Title :
Integrated Micro Multi Ion Sensor Using Field Effect of Semiconductor
Author :
Esashi, Masayoshi ; Matsuo, Tadayuki
Author_Institution :
Department of Electronic Engineering, Tohoku University
fDate :
3/1/1978 12:00:00 AM
Abstract :
The fabrication of a microprobe for simultaneous, independent and in-vivo measurements of H+ and Na+ ion activities is described.
Keywords :
Electrodes; Equations; FETs; Fabrication; Glass; Impedance; Insulation; Integrated circuit measurements; Microelectrodes; Presence network agents; Electric Conductivity; Glass; Hydrogen-Ion Concentration; Ion Exchange; Microelectrodes; Potassium; Semiconductors; Sodium; Transistors;
Journal_Title :
Biomedical Engineering, IEEE Transactions on
DOI :
10.1109/TBME.1978.326245
